SECS

The SECS (SEMI Equipment Communications Standard/Generic Equipment Model) is a communications standard published by Semiconductor Equipment and Materials International (SEMI).

It is built upon the three SEMI standards E5-0224, E30-0224 and E37-00-0222, where the communication with a semiconductor device is done via TCP/IP.

SECS Host

The driver acts as a host which can connect to several devices, gather their data or send control requests. The communication standard is the SECS-II standard (E5), which defines the messages sent between device and host (the WinCC OA driver).

WinCC OA driver

A connection to an equipment can be HSMS (HIGH-SPEED SECS MESSAGE SERVICES) active which is equivalent to TCP-client or HSMS passive which is equivalent to TCP-Server. The mode of a connection can be easily switched in the connection configuration panel. The driver can connect to multiple devices and additionally supports redundant connections. In WinCC OA data is exchanged between the host (WinCC OA driver) and device via JSON strings. The definition of the JSON message structure can be found in the chapter Message Structure.

Security

Please note that the TCP/IP communication between host and device is not encrypted per definition of the SEMI Standards. Therefore, this driver must only be used in secure networks and environments.